JPS62158853U - - Google Patents
Info
- Publication number
- JPS62158853U JPS62158853U JP4700186U JP4700186U JPS62158853U JP S62158853 U JPS62158853 U JP S62158853U JP 4700186 U JP4700186 U JP 4700186U JP 4700186 U JP4700186 U JP 4700186U JP S62158853 U JPS62158853 U JP S62158853U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- cooling water
- temperature
- laser device
- alarm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Laser Surgery Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4700186U JPS62158853U (enExample) | 1986-03-28 | 1986-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4700186U JPS62158853U (enExample) | 1986-03-28 | 1986-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62158853U true JPS62158853U (enExample) | 1987-10-08 |
Family
ID=30867186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4700186U Pending JPS62158853U (enExample) | 1986-03-28 | 1986-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62158853U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01226002A (ja) * | 1988-03-07 | 1989-09-08 | Tokyo Electron Ltd | 半導体製造装置及び処理方法 |
| JP2020047816A (ja) * | 2018-09-20 | 2020-03-26 | 株式会社アマダホールディングス | レーザ発振器およびレーザ発振器の温度監視方法 |
-
1986
- 1986-03-28 JP JP4700186U patent/JPS62158853U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01226002A (ja) * | 1988-03-07 | 1989-09-08 | Tokyo Electron Ltd | 半導体製造装置及び処理方法 |
| JP2020047816A (ja) * | 2018-09-20 | 2020-03-26 | 株式会社アマダホールディングス | レーザ発振器およびレーザ発振器の温度監視方法 |