JPS62158853U - - Google Patents

Info

Publication number
JPS62158853U
JPS62158853U JP4700186U JP4700186U JPS62158853U JP S62158853 U JPS62158853 U JP S62158853U JP 4700186 U JP4700186 U JP 4700186U JP 4700186 U JP4700186 U JP 4700186U JP S62158853 U JPS62158853 U JP S62158853U
Authority
JP
Japan
Prior art keywords
laser
cooling water
temperature
laser device
alarm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4700186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4700186U priority Critical patent/JPS62158853U/ja
Publication of JPS62158853U publication Critical patent/JPS62158853U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Laser Surgery Devices (AREA)
JP4700186U 1986-03-28 1986-03-28 Pending JPS62158853U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4700186U JPS62158853U (enrdf_load_stackoverflow) 1986-03-28 1986-03-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4700186U JPS62158853U (enrdf_load_stackoverflow) 1986-03-28 1986-03-28

Publications (1)

Publication Number Publication Date
JPS62158853U true JPS62158853U (enrdf_load_stackoverflow) 1987-10-08

Family

ID=30867186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4700186U Pending JPS62158853U (enrdf_load_stackoverflow) 1986-03-28 1986-03-28

Country Status (1)

Country Link
JP (1) JPS62158853U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01226002A (ja) * 1988-03-07 1989-09-08 Tokyo Electron Ltd 半導体製造装置及び処理方法
JP2020047816A (ja) * 2018-09-20 2020-03-26 株式会社アマダホールディングス レーザ発振器およびレーザ発振器の温度監視方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01226002A (ja) * 1988-03-07 1989-09-08 Tokyo Electron Ltd 半導体製造装置及び処理方法
JP2020047816A (ja) * 2018-09-20 2020-03-26 株式会社アマダホールディングス レーザ発振器およびレーザ発振器の温度監視方法

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