JPS62158756U - - Google Patents

Info

Publication number
JPS62158756U
JPS62158756U JP4704286U JP4704286U JPS62158756U JP S62158756 U JPS62158756 U JP S62158756U JP 4704286 U JP4704286 U JP 4704286U JP 4704286 U JP4704286 U JP 4704286U JP S62158756 U JPS62158756 U JP S62158756U
Authority
JP
Japan
Prior art keywords
disk
rotating shaft
wafer
rotating
rotating part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4704286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0722851Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986047042U priority Critical patent/JPH0722851Y2/ja
Publication of JPS62158756U publication Critical patent/JPS62158756U/ja
Application granted granted Critical
Publication of JPH0722851Y2 publication Critical patent/JPH0722851Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986047042U 1986-03-29 1986-03-29 イオン処理装置 Expired - Lifetime JPH0722851Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986047042U JPH0722851Y2 (ja) 1986-03-29 1986-03-29 イオン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986047042U JPH0722851Y2 (ja) 1986-03-29 1986-03-29 イオン処理装置

Publications (2)

Publication Number Publication Date
JPS62158756U true JPS62158756U (enrdf_load_stackoverflow) 1987-10-08
JPH0722851Y2 JPH0722851Y2 (ja) 1995-05-24

Family

ID=30867268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986047042U Expired - Lifetime JPH0722851Y2 (ja) 1986-03-29 1986-03-29 イオン処理装置

Country Status (1)

Country Link
JP (1) JPH0722851Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932198U (ja) * 1982-08-23 1984-02-28 石川島播磨重工業株式会社 ポンプの回転数制御装置
JPS5986143A (ja) * 1982-11-09 1984-05-18 Ulvac Corp ウエハ自動交換装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932198U (ja) * 1982-08-23 1984-02-28 石川島播磨重工業株式会社 ポンプの回転数制御装置
JPS5986143A (ja) * 1982-11-09 1984-05-18 Ulvac Corp ウエハ自動交換装置

Also Published As

Publication number Publication date
JPH0722851Y2 (ja) 1995-05-24

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