JPS6215857B2 - - Google Patents

Info

Publication number
JPS6215857B2
JPS6215857B2 JP53165849A JP16584978A JPS6215857B2 JP S6215857 B2 JPS6215857 B2 JP S6215857B2 JP 53165849 A JP53165849 A JP 53165849A JP 16584978 A JP16584978 A JP 16584978A JP S6215857 B2 JPS6215857 B2 JP S6215857B2
Authority
JP
Japan
Prior art keywords
layer
gas
support
heat treatment
deposition chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53165849A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5591884A (en
Inventor
Tadaharu Fukuda
Yutaka Hirai
Katsumi Nakagawa
Toshuki Komatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP16584978A priority Critical patent/JPS5591884A/ja
Publication of JPS5591884A publication Critical patent/JPS5591884A/ja
Publication of JPS6215857B2 publication Critical patent/JPS6215857B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
  • Light Receiving Elements (AREA)
JP16584978A 1978-12-28 1978-12-28 Manufacture of amorphous photoconductive component Granted JPS5591884A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16584978A JPS5591884A (en) 1978-12-28 1978-12-28 Manufacture of amorphous photoconductive component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16584978A JPS5591884A (en) 1978-12-28 1978-12-28 Manufacture of amorphous photoconductive component

Publications (2)

Publication Number Publication Date
JPS5591884A JPS5591884A (en) 1980-07-11
JPS6215857B2 true JPS6215857B2 (enExample) 1987-04-09

Family

ID=15820158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16584978A Granted JPS5591884A (en) 1978-12-28 1978-12-28 Manufacture of amorphous photoconductive component

Country Status (1)

Country Link
JP (1) JPS5591884A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4394426A (en) * 1980-09-25 1983-07-19 Canon Kabushiki Kaisha Photoconductive member with α-Si(N) barrier layer
US4551352A (en) * 1985-01-17 1985-11-05 Rca Corporation Method of making P-type hydrogenated amorphous silicon
JPS61275851A (ja) * 1985-05-31 1986-12-05 Fuji Xerox Co Ltd 光導電部材の作成方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4064521A (en) * 1975-07-28 1977-12-20 Rca Corporation Semiconductor device having a body of amorphous silicon

Also Published As

Publication number Publication date
JPS5591884A (en) 1980-07-11

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