JPS62157840U - - Google Patents

Info

Publication number
JPS62157840U
JPS62157840U JP4597786U JP4597786U JPS62157840U JP S62157840 U JPS62157840 U JP S62157840U JP 4597786 U JP4597786 U JP 4597786U JP 4597786 U JP4597786 U JP 4597786U JP S62157840 U JPS62157840 U JP S62157840U
Authority
JP
Japan
Prior art keywords
metal bellows
wafer
suction
chuck
suction member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4597786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4597786U priority Critical patent/JPS62157840U/ja
Publication of JPS62157840U publication Critical patent/JPS62157840U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP4597786U 1986-03-28 1986-03-28 Pending JPS62157840U (US07655688-20100202-C00109.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4597786U JPS62157840U (US07655688-20100202-C00109.png) 1986-03-28 1986-03-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4597786U JPS62157840U (US07655688-20100202-C00109.png) 1986-03-28 1986-03-28

Publications (1)

Publication Number Publication Date
JPS62157840U true JPS62157840U (US07655688-20100202-C00109.png) 1987-10-07

Family

ID=30865211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4597786U Pending JPS62157840U (US07655688-20100202-C00109.png) 1986-03-28 1986-03-28

Country Status (1)

Country Link
JP (1) JPS62157840U (US07655688-20100202-C00109.png)

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