JPS62157736U - - Google Patents
Info
- Publication number
- JPS62157736U JPS62157736U JP4405386U JP4405386U JPS62157736U JP S62157736 U JPS62157736 U JP S62157736U JP 4405386 U JP4405386 U JP 4405386U JP 4405386 U JP4405386 U JP 4405386U JP S62157736 U JPS62157736 U JP S62157736U
- Authority
- JP
- Japan
- Prior art keywords
- wafer transport
- applies
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drives For Endless Conveyors (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4405386U JPS62157736U (enExample) | 1986-03-26 | 1986-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4405386U JPS62157736U (enExample) | 1986-03-26 | 1986-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62157736U true JPS62157736U (enExample) | 1987-10-07 |
Family
ID=30861495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4405386U Pending JPS62157736U (enExample) | 1986-03-26 | 1986-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62157736U (enExample) |
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1986
- 1986-03-26 JP JP4405386U patent/JPS62157736U/ja active Pending