JPS6215761U - - Google Patents
Info
- Publication number
- JPS6215761U JPS6215761U JP10679785U JP10679785U JPS6215761U JP S6215761 U JPS6215761 U JP S6215761U JP 10679785 U JP10679785 U JP 10679785U JP 10679785 U JP10679785 U JP 10679785U JP S6215761 U JPS6215761 U JP S6215761U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- valve seat
- moving shaft
- lever body
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 238000012856 packing Methods 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案の一実施例を示す断面図、第２
図は第１図のＡＡ断面図、第３図は第１図のＢＢ
断面図、第４図は動作を説明するための図である
。
１：鏡体、２：電子線通過用穴、３：弁座、４
：平面、５：側面、６：テコ体、７：ピン、８：
移動軸、９，１２：ボール、１０：弁体、１１ａ
，１１ｂ：スプリング、１３：凹部、１４：Ｏリ
ングパツキング、１５：エアーシリンダ、１６：
板バネ、１７ａ，１７ｂ：ガイドブロツク。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is the AA sectional view of Figure 1, and the figure 3 is the BB cross section of Figure 1.
The cross-sectional view and FIG. 4 are diagrams for explaining the operation. 1: Mirror body, 2: Hole for electron beam passage, 3: Valve seat, 4
: Plane, 5: Side, 6: Lever, 7: Pin, 8:
Moving axis, 9, 12: Ball, 10: Valve body, 11a
, 11b: Spring, 13: Recess, 14: O-ring packing, 15: Air cylinder, 16:
Leaf spring, 17a, 17b: guide block.
Claims (1)
垂直な側面を有する弁座と、該弁座に密着される
ことにより前記穴を遮断するためのＯリングパツ
キングを有する弁体と、一端に該弁体を回動可能
に支持したＬ字状のテコ体と、該テコ体の略中間
部を回転可能に保持した移動軸と、該移動軸を往
復動させるための駆動手段とを備え、前記移動軸
の移動により弁体が弁座の穴と対向する位置にお
かれたとき、テコ体の他端が弁座の側面に当接し
てこのテコ体が回転することにより弁体を弁座の
平面に押圧するように構成してなる電子線装置に
おける仕切弁。 a valve seat having a plane perpendicular to the electron beam passage hole and a side surface substantially perpendicular to the plane; a valve body having an O-ring packing for blocking the hole by being brought into close contact with the valve seat; one end; includes an L-shaped lever body rotatably supporting the valve body, a moving shaft rotatably holding a substantially middle portion of the lever body, and a driving means for reciprocating the moving shaft. When the valve body is placed in a position facing the hole in the valve seat due to the movement of the moving shaft, the other end of the lever body comes into contact with the side surface of the valve seat, and this lever body rotates, thereby pushing the valve body into the valve position. A gate valve in an electron beam device configured to press against a flat surface of a seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10679785U JPH0447890Y2 (en) | 1985-07-12 | 1985-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10679785U JPH0447890Y2 (en) | 1985-07-12 | 1985-07-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6215761U true JPS6215761U (en) | 1987-01-30 |
| JPH0447890Y2 JPH0447890Y2 (en) | 1992-11-11 |
Family
ID=30982488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10679785U Expired JPH0447890Y2 (en) | 1985-07-12 | 1985-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0447890Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008016306A (en) * | 2006-07-06 | 2008-01-24 | Sodick Co Ltd | Electron beam irradiation surface reforming device |
| JP2009048799A (en) * | 2007-08-14 | 2009-03-05 | Jeol Ltd | Charged particle beam device |
| JP2016115565A (en) * | 2014-12-16 | 2016-06-23 | 株式会社島津製作所 | Vacuum device and mass spectroscope including the same |
-
1985
- 1985-07-12 JP JP10679785U patent/JPH0447890Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008016306A (en) * | 2006-07-06 | 2008-01-24 | Sodick Co Ltd | Electron beam irradiation surface reforming device |
| JP2009048799A (en) * | 2007-08-14 | 2009-03-05 | Jeol Ltd | Charged particle beam device |
| JP2016115565A (en) * | 2014-12-16 | 2016-06-23 | 株式会社島津製作所 | Vacuum device and mass spectroscope including the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0447890Y2 (en) | 1992-11-11 |