JPS62157148U - - Google Patents

Info

Publication number
JPS62157148U
JPS62157148U JP4405486U JP4405486U JPS62157148U JP S62157148 U JPS62157148 U JP S62157148U JP 4405486 U JP4405486 U JP 4405486U JP 4405486 U JP4405486 U JP 4405486U JP S62157148 U JPS62157148 U JP S62157148U
Authority
JP
Japan
Prior art keywords
vacuum
chuck
suction chuck
wafer suction
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4405486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4405486U priority Critical patent/JPS62157148U/ja
Publication of JPS62157148U publication Critical patent/JPS62157148U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP4405486U 1986-03-26 1986-03-26 Pending JPS62157148U (US06818201-20041116-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4405486U JPS62157148U (US06818201-20041116-C00086.png) 1986-03-26 1986-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4405486U JPS62157148U (US06818201-20041116-C00086.png) 1986-03-26 1986-03-26

Publications (1)

Publication Number Publication Date
JPS62157148U true JPS62157148U (US06818201-20041116-C00086.png) 1987-10-06

Family

ID=30861497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4405486U Pending JPS62157148U (US06818201-20041116-C00086.png) 1986-03-26 1986-03-26

Country Status (1)

Country Link
JP (1) JPS62157148U (US06818201-20041116-C00086.png)

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