JPS62156845U - - Google Patents

Info

Publication number
JPS62156845U
JPS62156845U JP4479086U JP4479086U JPS62156845U JP S62156845 U JPS62156845 U JP S62156845U JP 4479086 U JP4479086 U JP 4479086U JP 4479086 U JP4479086 U JP 4479086U JP S62156845 U JPS62156845 U JP S62156845U
Authority
JP
Japan
Prior art keywords
metal plate
oscillator
unimorph
pressure sensor
case body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4479086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4479086U priority Critical patent/JPS62156845U/ja
Publication of JPS62156845U publication Critical patent/JPS62156845U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP4479086U 1986-03-28 1986-03-28 Pending JPS62156845U (US06373033-20020416-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4479086U JPS62156845U (US06373033-20020416-M00002.png) 1986-03-28 1986-03-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4479086U JPS62156845U (US06373033-20020416-M00002.png) 1986-03-28 1986-03-28

Publications (1)

Publication Number Publication Date
JPS62156845U true JPS62156845U (US06373033-20020416-M00002.png) 1987-10-05

Family

ID=30862930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4479086U Pending JPS62156845U (US06373033-20020416-M00002.png) 1986-03-28 1986-03-28

Country Status (1)

Country Link
JP (1) JPS62156845U (US06373033-20020416-M00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008070241A (ja) * 2006-09-14 2008-03-27 Epson Toyocom Corp 圧力センサ、及びその製造方法
WO2012063477A1 (ja) * 2010-11-10 2012-05-18 パナソニック株式会社 圧力センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008070241A (ja) * 2006-09-14 2008-03-27 Epson Toyocom Corp 圧力センサ、及びその製造方法
WO2012063477A1 (ja) * 2010-11-10 2012-05-18 パナソニック株式会社 圧力センサ

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