JPS62154720A - Semiconductor manufacturing equipment - Google Patents

Abstract

PURPOSE:To enable an operator to be trained in correct operations easily by using actual semiconductor manufacturing equipment for simulation in the same operations as actual ones by a method wherein a personal computer is additionally provided with a judging means etc. making the personal computer judge of any input signals from an input part to be for training or not. CONSTITUTION:A manufacturing unit 1 to be controlled for processing wafers, a controller (microcomputer) 2 controlling the manufacturing unit 1, an outer memory 8 storing the control program of controller 2, a display device 7 displaying the controlled items by controller 2 and input.output data, an input part 9 inputting the controlled items and data in the data from the outer memory 8, the display device 7 and the input part 9 in and out of the controller 2 are provided. Furthermore, a displaying means making the displayer device 7 displaying the selective direction for training or operation, a judging means making the personal computer 3 judge of the input signals from input part 9 to be for training or not and a transmitting means transmitting directive signals for testing when the judging means judges of the input signals to be for training are additionally provided.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to semiconductor manufacturing equipment, and particularly to semiconductor manufacturing 1aIi!, which is suitable for operator training when introducing semiconductor manufacturing equipment. It is related to.

[Background of the invention]

Conventional semiconductor manufacturing equipment causes operators to input incorrect information.

There were some that had to be operated while checking interactively to avoid making mistakes. However, when you first operate it,
It is normal to operate the device gingerly while reading the instruction manual, etc.
There was a problem that was difficult to understand just by looking at the instruction manual.

It is also conceivable that instead of reading the instruction manual, the user may use a simulation machine and receive training through a simulation before operating the device.

However, even after receiving training using the simulation system, there was a problem in that the users inevitably felt confused when operating the actual equipment.

Incidentally, related documents of this type include, for example, Japanese Patent Application Laid-open No. 12469/1983.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor manufacturing apparatus that uses an actual semiconductor manufacturing apparatus to simulate the same operation as the actual operation, and allows an operator to be taught correct operations in an easy-to-understand manner.

[Summary of the invention]

The present invention comprises a controlled glazing device for processing sea urchins, a control device for controlling a liquid extraction control device, and an external storage device for storing a control program for the control device. display g! that displays the location, control details and input/output data of the control device; an input unit for inputting control contents and data to the control device; and a personal combination unit for inputting and outputting data from the external storage device, display device and input unit to the control device;
- a display means for displaying a selection instruction as to whether the input signal from the input section is for educational purposes on the display device; and a determining means for causing the personal computer to determine whether the input signal from the input section is for educational purposes or not; , further comprising transmitting means for sending a signal instructing the control device that the control device is for testing when the determining means determines that the control device is for testing, and the controlled device is not moved during the training of the operator; Simulation is performed on a personal computer section, and the input section used when operating the controlled device is used as is, and the simulation is performed in the same way as the actual operation, so that the operator can be taught the correct operation in an easy-to-understand manner. It is.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be explained with reference to the first factor to FIG. 5.

FIG. 1 shows the configuration of a semiconductor manufacturing apparatus, in which a control device such as a microcomputer 2 for controlling the manufacturing apparatus 1 is vertically mounted on a manufacturing apparatus fill that actually processes wafers with a controlled device such as an etching apparatus. A personal computer 3 is connected to the microcomputer 2. Specifically, the input/output device j4 of the personal computer 3 and the microcomputer 2 are connected, and
The input/output devices 51!4 include a display device 7 such as a CRT, an external storage device 8 such as a floppy disk, and a manufacturing device f! The input section 9 is connected to the input section 9 through which various inputs are made during operation. The input/output device 11f4 further includes a central processing unit (hereinafter referred to as C).
(referred to as PU5), and the CPU5 is connected to the storage device R6.

With the above configuration, as shown in FIG. 2, first turn on the power switch 10. As a result, the program stored in the external storage device R8 is read into the input/output device a4 according to instructions from the CPU 5 using the reading program stored in advance in the storage device 6.
, and starts execution on CPU5. With this loaded program, the display device r! 110 The operator sees this display and presses the educational/implementation selection push button switch on the input section 9. 12. The selection signal from the input section 9 is , is taken into the CPU 5 via the input/output device 4, and as a result of the 13° judgment that determines whether the signal is for educational purposes, if it is not for educational purposes, the control device 2
The manufacturing equipment then moves on to the actual processing of the wafer.1
4. Next, it is determined whether or not the processing of the wafer has been completed. If not, the actual processing operation 14 is repeated, and when it is completed, the power switch is turned off and the processing ends in step 16.

On the other hand, when the selection signal is for educational purposes, the personal computer 3 is
According to the program and data read from the external storage device 8, a signal indicating that the operation is for educational purposes is sent from the input/output device 6 to the control device 2 according to instructions from the CPU 5.
7. Stop the operation of the control device 2 and manufacturing device 1 (.

Next, the training program for the operator starts to be executed, and in this case, the contents of the 18° display which displays the entire outline of the operating system as a semiconductor manufacturing device are shown in FIG. tE3, for example. For example, when the power is turned on, pre-processing is performed and the semiconductor manufacturing apparatus is put into a standby state, and at this time, processing such as etching, checking, or cleaning can be selected by pressing a button. If you want to end the display, press the display cancel switch to exit. If it is determined that the process is finished (19), the process proceeds to the next step.

Next, the names and functions of each part of the entire semiconductor manufacturing apparatus are displayed 20, and the operator, looking at this display, selects the function he wants to see in more detail and inputs the selected symbol. 21. Determine the signal of the selected symbol. m
If there is a function selection, the display contents of the 22° name and function, which enlarge and display the selected part, are shown in FIG. 4, for example. For example, if you display the name of each part of semiconductor manufacturing equipment and specify the number attached to that name,
The name part in the overall diagram is displayed blinking, or the name part is enlarged and displayed in response to an enlargement instruction. If you want to end the display, press the display cancel switch to exit. Completion and Judgment 23
Then proceed to the next step.

Up to this point, guidance for semiconductor manufacturing equipment has been explained.

Next, we will move on to the simulation of wafer processing using semiconductor manufacturing equipment. First, a message indicating that processing is to be started is displayed (24), and a message asking whether or not data is to be entered is displayed. If you need to input data, press the key switch. The presence or absence of input is determined by the signal from this switch 25, and in this case, since it is important, guidance on how to input data is displayed 26. Following this display, the operator inputs data from the input section 9. 27 , when there is no need for data input 25 starts after the data input 27. When the processing start button is pressed 28, the state of movement of the sea urchin/% is displayed on the display device 7 29, and the wafer processing push button switch is operated according to the displayed content to move the wafer 30°. The displayed contents of the status are shown in FIG. 5, for example. For example, a wafer transported to a loading chamber is transported into the processing chamber by a transport belt, then placed on a processing table by a transport arm for loading, and after processing is finished, it is transferred to a transport belt by a transport arm for unloading. An animation shows how the processed wafer is returned to the top and carried out from the processing chamber to the unloading chamber by the conveyor belt.

Once you have mastered the operation of the semiconductor manufacturing equipment using the simulator, press the release switch to exit the simulator state. When it is determined that the training is finished (31L/), the power switch is turned off and the training using the actual semiconductor manufacturing equipment is completed.

As described above, according to this embodiment, it is possible to learn the overall configuration and the same operations as the wafer processing of the actual machine using the actual semiconductor manufacturing equipment, so it is possible for first-time users to easily understand the complete details of the equipment. can. In addition, the visual explanation and the hands-on device are in the same location (there are two), so there is no need to change the location to learn.It is possible to expose and repeat the operations, so the operator can repeat the operations and learn the parts he wants to know at any time. In addition, since the wafer movement status is displayed on the CRT,
Operations can be safely understood even in areas that cannot be seen from the outside during actual wafer processing. Furthermore, since it has a simulation function, training can be conducted by simply operating the device without moving the device.

〔Effect of the invention〕

According to the present invention, it is possible to determine whether the semiconductor manufacturing equipment is for educational use, and to perform a simulation run using the same operation as the actual operation using the operating section of the equipment without actually operating the semiconductor manufacturing equipment itself. It has the effect of making it easy to understand (training) correct operations.

[Brief explanation of drawings]

! FIG. 1 is a block diagram showing the configuration of a semiconductor manufacturing apparatus that is an embodiment of the present invention, FIG. 2 is a flowchart showing the operating procedure, and FIGS. 3 to 5 show an embodiment carried out according to FIG. 2. It is a diagram. 1...Package construction lock, 2...Microcomputer, 3...Personal computer, 4
・・・・・・Input device, Fig. 2; lt4 Fig. 5

Claims (1)

[Claims] 1. Displaying a controlled device that processes wafers, a control device that controls the controlled device, an external storage device that stores a control program for the control device, and control contents and input/output data of the control device. an input section for inputting control details and data to the control device; and a personal computer for inputting and outputting data from the external storage device, display device, and input section to the control device; a display means for displaying a selection instruction as to whether the input signal is for educational use or implementation on a display device; a determining means for causing the personal computer to determine whether the input signal from the input unit is for educational use; 1. A semiconductor manufacturing apparatus, further comprising transmitting means for transmitting a signal instructing the control apparatus that the control apparatus is for testing when it is determined that the apparatus is for testing.