JPS62154647U - - Google Patents

Info

Publication number
JPS62154647U
JPS62154647U JP4227286U JP4227286U JPS62154647U JP S62154647 U JPS62154647 U JP S62154647U JP 4227286 U JP4227286 U JP 4227286U JP 4227286 U JP4227286 U JP 4227286U JP S62154647 U JPS62154647 U JP S62154647U
Authority
JP
Japan
Prior art keywords
wafer
wafer holder
stopping means
driving means
loading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4227286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4227286U priority Critical patent/JPS62154647U/ja
Publication of JPS62154647U publication Critical patent/JPS62154647U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
JP4227286U 1986-03-22 1986-03-22 Pending JPS62154647U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4227286U JPS62154647U (enrdf_load_stackoverflow) 1986-03-22 1986-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4227286U JPS62154647U (enrdf_load_stackoverflow) 1986-03-22 1986-03-22

Publications (1)

Publication Number Publication Date
JPS62154647U true JPS62154647U (enrdf_load_stackoverflow) 1987-10-01

Family

ID=30858027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4227286U Pending JPS62154647U (enrdf_load_stackoverflow) 1986-03-22 1986-03-22

Country Status (1)

Country Link
JP (1) JPS62154647U (enrdf_load_stackoverflow)

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