JPS62154646U - - Google Patents

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Publication number
JPS62154646U
JPS62154646U JP4219886U JP4219886U JPS62154646U JP S62154646 U JPS62154646 U JP S62154646U JP 4219886 U JP4219886 U JP 4219886U JP 4219886 U JP4219886 U JP 4219886U JP S62154646 U JPS62154646 U JP S62154646U
Authority
JP
Japan
Prior art keywords
holding
view
groove
semiconductor
facing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4219886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249725Y2 (US07847105-20101207-C00016.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4219886U priority Critical patent/JPH0249725Y2/ja
Publication of JPS62154646U publication Critical patent/JPS62154646U/ja
Application granted granted Critical
Publication of JPH0249725Y2 publication Critical patent/JPH0249725Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Packaging Frangible Articles (AREA)
JP4219886U 1986-03-22 1986-03-22 Expired JPH0249725Y2 (US07847105-20101207-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4219886U JPH0249725Y2 (US07847105-20101207-C00016.png) 1986-03-22 1986-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4219886U JPH0249725Y2 (US07847105-20101207-C00016.png) 1986-03-22 1986-03-22

Publications (2)

Publication Number Publication Date
JPS62154646U true JPS62154646U (US07847105-20101207-C00016.png) 1987-10-01
JPH0249725Y2 JPH0249725Y2 (US07847105-20101207-C00016.png) 1990-12-27

Family

ID=30857883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4219886U Expired JPH0249725Y2 (US07847105-20101207-C00016.png) 1986-03-22 1986-03-22

Country Status (1)

Country Link
JP (1) JPH0249725Y2 (US07847105-20101207-C00016.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01160833U (US07847105-20101207-C00016.png) * 1988-04-12 1989-11-08
JPH03143837A (ja) * 1989-10-26 1991-06-19 Oki Electric Ind Co Ltd ウエハ搬送処理装置とそれを用いた搬送処理方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01160833U (US07847105-20101207-C00016.png) * 1988-04-12 1989-11-08
JPH03143837A (ja) * 1989-10-26 1991-06-19 Oki Electric Ind Co Ltd ウエハ搬送処理装置とそれを用いた搬送処理方法

Also Published As

Publication number Publication date
JPH0249725Y2 (US07847105-20101207-C00016.png) 1990-12-27

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