JPS62153232U - - Google Patents
Info
- Publication number
- JPS62153232U JPS62153232U JP4086986U JP4086986U JPS62153232U JP S62153232 U JPS62153232 U JP S62153232U JP 4086986 U JP4086986 U JP 4086986U JP 4086986 U JP4086986 U JP 4086986U JP S62153232 U JPS62153232 U JP S62153232U
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- truck
- moves
- carrier
- tilting table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 7
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4086986U JPS62153232U (ko) | 1986-03-20 | 1986-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4086986U JPS62153232U (ko) | 1986-03-20 | 1986-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62153232U true JPS62153232U (ko) | 1987-09-29 |
Family
ID=30855342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4086986U Pending JPS62153232U (ko) | 1986-03-20 | 1986-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62153232U (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5587652A (en) * | 1978-12-27 | 1980-07-02 | Tokyo Shibaura Electric Co | Dusttproof conveyor |
-
1986
- 1986-03-20 JP JP4086986U patent/JPS62153232U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5587652A (en) * | 1978-12-27 | 1980-07-02 | Tokyo Shibaura Electric Co | Dusttproof conveyor |
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