JPS62152446U - - Google Patents

Info

Publication number
JPS62152446U
JPS62152446U JP4101286U JP4101286U JPS62152446U JP S62152446 U JPS62152446 U JP S62152446U JP 4101286 U JP4101286 U JP 4101286U JP 4101286 U JP4101286 U JP 4101286U JP S62152446 U JPS62152446 U JP S62152446U
Authority
JP
Japan
Prior art keywords
cassette
grip
handling jig
abutment
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4101286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4101286U priority Critical patent/JPS62152446U/ja
Publication of JPS62152446U publication Critical patent/JPS62152446U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP4101286U 1986-03-19 1986-03-19 Pending JPS62152446U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4101286U JPS62152446U (enrdf_load_stackoverflow) 1986-03-19 1986-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4101286U JPS62152446U (enrdf_load_stackoverflow) 1986-03-19 1986-03-19

Publications (1)

Publication Number Publication Date
JPS62152446U true JPS62152446U (enrdf_load_stackoverflow) 1987-09-28

Family

ID=30855616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4101286U Pending JPS62152446U (enrdf_load_stackoverflow) 1986-03-19 1986-03-19

Country Status (1)

Country Link
JP (1) JPS62152446U (enrdf_load_stackoverflow)

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