JPS62152437U - - Google Patents

Info

Publication number

JPS62152437U

JPS62152437U JP3909986U JP3909986U JPS62152437U JP S62152437 U JPS62152437 U JP S62152437U JP 3909986 U JP3909986 U JP 3909986U JP 3909986 U JP3909986 U JP 3909986U JP S62152437 U JPS62152437 U JP S62152437U

Authority

JP

Japan

Prior art keywords

lower electrode

heating device

post

utility

registration request

Prior art date

1986-03-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005530 etching Methods 0.000 claims description 2
• 238000010438 heat treatment Methods 0.000 claims description 2
• 238000001312 dry etching Methods 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 claims 1
• 238000012805 post-processing Methods 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1