JPS62149798U - - Google Patents

Info

Publication number
JPS62149798U
JPS62149798U JP3814486U JP3814486U JPS62149798U JP S62149798 U JPS62149798 U JP S62149798U JP 3814486 U JP3814486 U JP 3814486U JP 3814486 U JP3814486 U JP 3814486U JP S62149798 U JPS62149798 U JP S62149798U
Authority
JP
Japan
Prior art keywords
tube
exhaust pipe
heating chamber
gas exhaust
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3814486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0440160Y2 (US06534493-20030318-C00166.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3814486U priority Critical patent/JPH0440160Y2/ja
Publication of JPS62149798U publication Critical patent/JPS62149798U/ja
Application granted granted Critical
Publication of JPH0440160Y2 publication Critical patent/JPH0440160Y2/ja
Expired legal-status Critical Current

Links

JP3814486U 1986-03-14 1986-03-14 Expired JPH0440160Y2 (US06534493-20030318-C00166.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3814486U JPH0440160Y2 (US06534493-20030318-C00166.png) 1986-03-14 1986-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3814486U JPH0440160Y2 (US06534493-20030318-C00166.png) 1986-03-14 1986-03-14

Publications (2)

Publication Number Publication Date
JPS62149798U true JPS62149798U (US06534493-20030318-C00166.png) 1987-09-22
JPH0440160Y2 JPH0440160Y2 (US06534493-20030318-C00166.png) 1992-09-21

Family

ID=30850111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3814486U Expired JPH0440160Y2 (US06534493-20030318-C00166.png) 1986-03-14 1986-03-14

Country Status (1)

Country Link
JP (1) JPH0440160Y2 (US06534493-20030318-C00166.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997031389A1 (fr) * 1996-02-23 1997-08-28 Tokyo Electron Limited Dispositif de traitement thermique
JP2007205691A (ja) * 2006-02-06 2007-08-16 Furukawa Electric Co Ltd:The グラファイト加熱炉

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997031389A1 (fr) * 1996-02-23 1997-08-28 Tokyo Electron Limited Dispositif de traitement thermique
JP2007205691A (ja) * 2006-02-06 2007-08-16 Furukawa Electric Co Ltd:The グラファイト加熱炉
US8549886B2 (en) 2006-02-06 2013-10-08 The Furukawa Electric Co., Ltd. Graphite heating furnace
US9458051B2 (en) 2006-02-06 2016-10-04 Furukawa Electric Co., Ltd. Graphite heating furnace

Also Published As

Publication number Publication date
JPH0440160Y2 (US06534493-20030318-C00166.png) 1992-09-21

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