JPS62149723U - - Google Patents
Info
- Publication number
- JPS62149723U JPS62149723U JP3738486U JP3738486U JPS62149723U JP S62149723 U JPS62149723 U JP S62149723U JP 3738486 U JP3738486 U JP 3738486U JP 3738486 U JP3738486 U JP 3738486U JP S62149723 U JPS62149723 U JP S62149723U
- Authority
- JP
- Japan
- Prior art keywords
- base
- clean room
- elastic plate
- exhaust port
- wall panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3738486U JPS62149723U (zh) | 1986-03-13 | 1986-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3738486U JPS62149723U (zh) | 1986-03-13 | 1986-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62149723U true JPS62149723U (zh) | 1987-09-22 |
Family
ID=30848665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3738486U Pending JPS62149723U (zh) | 1986-03-13 | 1986-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62149723U (zh) |
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1986
- 1986-03-13 JP JP3738486U patent/JPS62149723U/ja active Pending