JPS6214923U - - Google Patents

Info

Publication number
JPS6214923U
JPS6214923U JP10613185U JP10613185U JPS6214923U JP S6214923 U JPS6214923 U JP S6214923U JP 10613185 U JP10613185 U JP 10613185U JP 10613185 U JP10613185 U JP 10613185U JP S6214923 U JPS6214923 U JP S6214923U
Authority
JP
Japan
Prior art keywords
conductor
notch
side walls
groove
insulating material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10613185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10613185U priority Critical patent/JPS6214923U/ja
Publication of JPS6214923U publication Critical patent/JPS6214923U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Installation Of Bus-Bars (AREA)
JP10613185U 1985-07-11 1985-07-11 Pending JPS6214923U (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10613185U JPS6214923U (US20080094685A1-20080424-C00004.png) 1985-07-11 1985-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10613185U JPS6214923U (US20080094685A1-20080424-C00004.png) 1985-07-11 1985-07-11

Publications (1)

Publication Number Publication Date
JPS6214923U true JPS6214923U (US20080094685A1-20080424-C00004.png) 1987-01-29

Family

ID=30981211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10613185U Pending JPS6214923U (US20080094685A1-20080424-C00004.png) 1985-07-11 1985-07-11

Country Status (1)

Country Link
JP (1) JPS6214923U (US20080094685A1-20080424-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111742401A (zh) * 2018-02-20 2020-10-02 应用材料公司 用于原子层沉积(ald)温度均匀性的热解氮化硼(pbn)加热器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111742401A (zh) * 2018-02-20 2020-10-02 应用材料公司 用于原子层沉积(ald)温度均匀性的热解氮化硼(pbn)加热器
JP2021514110A (ja) * 2018-02-20 2021-06-03 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated Ald温度均一性のためのpbnヒータ

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