JPS62148566U - - Google Patents

Info

Publication number
JPS62148566U
JPS62148566U JP3476486U JP3476486U JPS62148566U JP S62148566 U JPS62148566 U JP S62148566U JP 3476486 U JP3476486 U JP 3476486U JP 3476486 U JP3476486 U JP 3476486U JP S62148566 U JPS62148566 U JP S62148566U
Authority
JP
Japan
Prior art keywords
vacuum
signal
relay
heater
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3476486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3476486U priority Critical patent/JPS62148566U/ja
Publication of JPS62148566U publication Critical patent/JPS62148566U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3476486U 1986-03-11 1986-03-11 Pending JPS62148566U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3476486U JPS62148566U (US20020051482A1-20020502-M00012.png) 1986-03-11 1986-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3476486U JPS62148566U (US20020051482A1-20020502-M00012.png) 1986-03-11 1986-03-11

Publications (1)

Publication Number Publication Date
JPS62148566U true JPS62148566U (US20020051482A1-20020502-M00012.png) 1987-09-19

Family

ID=30843620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3476486U Pending JPS62148566U (US20020051482A1-20020502-M00012.png) 1986-03-11 1986-03-11

Country Status (1)

Country Link
JP (1) JPS62148566U (US20020051482A1-20020502-M00012.png)

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