JPS62147433U - - Google Patents
Info
- Publication number
- JPS62147433U JPS62147433U JP3486387U JP3486387U JPS62147433U JP S62147433 U JPS62147433 U JP S62147433U JP 3486387 U JP3486387 U JP 3486387U JP 3486387 U JP3486387 U JP 3486387U JP S62147433 U JPS62147433 U JP S62147433U
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- static pressure
- signal
- amplifier
- differential amplifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 230000003068 static effect Effects 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims 2
- 230000008713 feedback mechanism Effects 0.000 claims 1
- 230000002706 hydrostatic effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Machine Tool Units (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3486387U JPS62147433U (enrdf_load_stackoverflow) | 1987-03-10 | 1987-03-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3486387U JPS62147433U (enrdf_load_stackoverflow) | 1987-03-10 | 1987-03-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62147433U true JPS62147433U (enrdf_load_stackoverflow) | 1987-09-17 |
Family
ID=30843813
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3486387U Pending JPS62147433U (enrdf_load_stackoverflow) | 1987-03-10 | 1987-03-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62147433U (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006309654A (ja) * | 2005-05-02 | 2006-11-09 | Psc Kk | 気体制御回転移動装置及び気体制御アクチュエータ |
JP2007142292A (ja) * | 2005-11-22 | 2007-06-07 | Advanced Mask Inspection Technology Kk | 基板検査装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5217915A (en) * | 1975-07-31 | 1977-02-10 | Nippon Telegraph & Telephone | Printer |
-
1987
- 1987-03-10 JP JP3486387U patent/JPS62147433U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5217915A (en) * | 1975-07-31 | 1977-02-10 | Nippon Telegraph & Telephone | Printer |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006309654A (ja) * | 2005-05-02 | 2006-11-09 | Psc Kk | 気体制御回転移動装置及び気体制御アクチュエータ |
JP2007142292A (ja) * | 2005-11-22 | 2007-06-07 | Advanced Mask Inspection Technology Kk | 基板検査装置 |