JPS62147362U - - Google Patents

Info

Publication number

JPS62147362U

JPS62147362U JP3503686U JP3503686U JPS62147362U JP S62147362 U JPS62147362 U JP S62147362U JP 3503686 U JP3503686 U JP 3503686U JP 3503686 U JP3503686 U JP 3503686U JP S62147362 U JPS62147362 U JP S62147362U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

integrated circuit

microwave integrated

relative permittivity

strip line

Prior art date

1986-03-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000004065 semiconductor Substances 0.000 claims description 12
• 239000000758 substrate Substances 0.000 claims description 12
• 239000004020 conductor Substances 0.000 claims description 5
• 239000003989 dielectric material Substances 0.000 claims description 5
• 239000000463 material Substances 0.000 claims description 4
• 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
• GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 4
• 229910010413 TiO 2 Inorganic materials 0.000 description 2