JPS62147344U - - Google Patents

Info

Publication number

JPS62147344U

JPS62147344U JP3521986U JP3521986U JPS62147344U JP S62147344 U JPS62147344 U JP S62147344U JP 3521986 U JP3521986 U JP 3521986U JP 3521986 U JP3521986 U JP 3521986U JP S62147344 U JPS62147344 U JP S62147344U

Authority

JP

Japan

Prior art keywords

metal layer

base metal

bump electrode

wiring metal

wiring

Prior art date

1986-03-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010953 base metal Substances 0.000 claims description 3
• 239000002184 metal Substances 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 239000004020 conductor Substances 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 150000004767 nitrides Chemical class 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1