JPS6214733U - - Google Patents

Info

Publication number
JPS6214733U
JPS6214733U JP10563985U JP10563985U JPS6214733U JP S6214733 U JPS6214733 U JP S6214733U JP 10563985 U JP10563985 U JP 10563985U JP 10563985 U JP10563985 U JP 10563985U JP S6214733 U JPS6214733 U JP S6214733U
Authority
JP
Japan
Prior art keywords
protrusion
positioning device
wafer transfer
locus
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10563985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0110931Y2 (US06272168-20010807-M00014.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10563985U priority Critical patent/JPH0110931Y2/ja
Publication of JPS6214733U publication Critical patent/JPS6214733U/ja
Application granted granted Critical
Publication of JPH0110931Y2 publication Critical patent/JPH0110931Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP10563985U 1985-07-12 1985-07-12 Expired JPH0110931Y2 (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10563985U JPH0110931Y2 (US06272168-20010807-M00014.png) 1985-07-12 1985-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10563985U JPH0110931Y2 (US06272168-20010807-M00014.png) 1985-07-12 1985-07-12

Publications (2)

Publication Number Publication Date
JPS6214733U true JPS6214733U (US06272168-20010807-M00014.png) 1987-01-29
JPH0110931Y2 JPH0110931Y2 (US06272168-20010807-M00014.png) 1989-03-29

Family

ID=30980260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10563985U Expired JPH0110931Y2 (US06272168-20010807-M00014.png) 1985-07-12 1985-07-12

Country Status (1)

Country Link
JP (1) JPH0110931Y2 (US06272168-20010807-M00014.png)

Also Published As

Publication number Publication date
JPH0110931Y2 (US06272168-20010807-M00014.png) 1989-03-29

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