JPS62147339U - - Google Patents
Info
- Publication number
- JPS62147339U JPS62147339U JP3555286U JP3555286U JPS62147339U JP S62147339 U JPS62147339 U JP S62147339U JP 3555286 U JP3555286 U JP 3555286U JP 3555286 U JP3555286 U JP 3555286U JP S62147339 U JPS62147339 U JP S62147339U
- Authority
- JP
- Japan
- Prior art keywords
- aligner
- optical sensor
- exposure time
- installed near
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Measurement Of Unknown Time Intervals (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3555286U JPH0445234Y2 (https=) | 1986-03-12 | 1986-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3555286U JPH0445234Y2 (https=) | 1986-03-12 | 1986-03-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62147339U true JPS62147339U (https=) | 1987-09-17 |
| JPH0445234Y2 JPH0445234Y2 (https=) | 1992-10-23 |
Family
ID=30845154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3555286U Expired JPH0445234Y2 (https=) | 1986-03-12 | 1986-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0445234Y2 (https=) |
-
1986
- 1986-03-12 JP JP3555286U patent/JPH0445234Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0445234Y2 (https=) | 1992-10-23 |