JPS62147339U - - Google Patents

Info

Publication number
JPS62147339U
JPS62147339U JP3555286U JP3555286U JPS62147339U JP S62147339 U JPS62147339 U JP S62147339U JP 3555286 U JP3555286 U JP 3555286U JP 3555286 U JP3555286 U JP 3555286U JP S62147339 U JPS62147339 U JP S62147339U
Authority
JP
Japan
Prior art keywords
aligner
optical sensor
exposure time
installed near
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3555286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0445234Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3555286U priority Critical patent/JPH0445234Y2/ja
Publication of JPS62147339U publication Critical patent/JPS62147339U/ja
Application granted granted Critical
Publication of JPH0445234Y2 publication Critical patent/JPH0445234Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Unknown Time Intervals (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3555286U 1986-03-12 1986-03-12 Expired JPH0445234Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3555286U JPH0445234Y2 (enrdf_load_stackoverflow) 1986-03-12 1986-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3555286U JPH0445234Y2 (enrdf_load_stackoverflow) 1986-03-12 1986-03-12

Publications (2)

Publication Number Publication Date
JPS62147339U true JPS62147339U (enrdf_load_stackoverflow) 1987-09-17
JPH0445234Y2 JPH0445234Y2 (enrdf_load_stackoverflow) 1992-10-23

Family

ID=30845154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3555286U Expired JPH0445234Y2 (enrdf_load_stackoverflow) 1986-03-12 1986-03-12

Country Status (1)

Country Link
JP (1) JPH0445234Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0445234Y2 (enrdf_load_stackoverflow) 1992-10-23

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