JPS6214720U - - Google Patents
Info
- Publication number
- JPS6214720U JPS6214720U JP10642685U JP10642685U JPS6214720U JP S6214720 U JPS6214720 U JP S6214720U JP 10642685 U JP10642685 U JP 10642685U JP 10642685 U JP10642685 U JP 10642685U JP S6214720 U JPS6214720 U JP S6214720U
- Authority
- JP
- Japan
- Prior art keywords
- process chamber
- exhaust ports
- vacuum exhaust
- center
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 4
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10642685U JPS6214720U (is) | 1985-07-11 | 1985-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10642685U JPS6214720U (is) | 1985-07-11 | 1985-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6214720U true JPS6214720U (is) | 1987-01-29 |
Family
ID=30981772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10642685U Pending JPS6214720U (is) | 1985-07-11 | 1985-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6214720U (is) |
-
1985
- 1985-07-11 JP JP10642685U patent/JPS6214720U/ja active Pending
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