JPS6214720U - - Google Patents

Info

Publication number
JPS6214720U
JPS6214720U JP10642685U JP10642685U JPS6214720U JP S6214720 U JPS6214720 U JP S6214720U JP 10642685 U JP10642685 U JP 10642685U JP 10642685 U JP10642685 U JP 10642685U JP S6214720 U JPS6214720 U JP S6214720U
Authority
JP
Japan
Prior art keywords
process chamber
exhaust ports
vacuum exhaust
center
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10642685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10642685U priority Critical patent/JPS6214720U/ja
Publication of JPS6214720U publication Critical patent/JPS6214720U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP10642685U 1985-07-11 1985-07-11 Pending JPS6214720U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10642685U JPS6214720U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-07-11 1985-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10642685U JPS6214720U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-07-11 1985-07-11

Publications (1)

Publication Number Publication Date
JPS6214720U true JPS6214720U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-29

Family

ID=30981772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10642685U Pending JPS6214720U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-07-11 1985-07-11

Country Status (1)

Country Link
JP (1) JPS6214720U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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