JPS6214718U - - Google Patents
Info
- Publication number
- JPS6214718U JPS6214718U JP10652985U JP10652985U JPS6214718U JP S6214718 U JPS6214718 U JP S6214718U JP 10652985 U JP10652985 U JP 10652985U JP 10652985 U JP10652985 U JP 10652985U JP S6214718 U JPS6214718 U JP S6214718U
- Authority
- JP
- Japan
- Prior art keywords
- supply device
- gas supply
- semiconductor gas
- operated valve
- opened
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Fluid-Driven Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10652985U JPS6214718U (ko) | 1985-07-12 | 1985-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10652985U JPS6214718U (ko) | 1985-07-12 | 1985-07-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6214718U true JPS6214718U (ko) | 1987-01-29 |
Family
ID=30981974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10652985U Pending JPS6214718U (ko) | 1985-07-12 | 1985-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6214718U (ko) |
-
1985
- 1985-07-12 JP JP10652985U patent/JPS6214718U/ja active Pending