JPS62146591U - - Google Patents

Info

Publication number
JPS62146591U
JPS62146591U JP3220486U JP3220486U JPS62146591U JP S62146591 U JPS62146591 U JP S62146591U JP 3220486 U JP3220486 U JP 3220486U JP 3220486 U JP3220486 U JP 3220486U JP S62146591 U JPS62146591 U JP S62146591U
Authority
JP
Japan
Prior art keywords
substrate
bearing
positioning
stage
corner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3220486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3220486U priority Critical patent/JPS62146591U/ja
Publication of JPS62146591U publication Critical patent/JPS62146591U/ja
Pending legal-status Critical Current

Links

JP3220486U 1986-03-06 1986-03-06 Pending JPS62146591U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3220486U JPS62146591U (US20110009641A1-20110113-C00185.png) 1986-03-06 1986-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3220486U JPS62146591U (US20110009641A1-20110113-C00185.png) 1986-03-06 1986-03-06

Publications (1)

Publication Number Publication Date
JPS62146591U true JPS62146591U (US20110009641A1-20110113-C00185.png) 1987-09-16

Family

ID=30838658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3220486U Pending JPS62146591U (US20110009641A1-20110113-C00185.png) 1986-03-06 1986-03-06

Country Status (1)

Country Link
JP (1) JPS62146591U (US20110009641A1-20110113-C00185.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02123389U (US20110009641A1-20110113-C00185.png) * 1989-03-23 1990-10-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02123389U (US20110009641A1-20110113-C00185.png) * 1989-03-23 1990-10-11

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