JPS62145809A - Shutter for molecular beam source - Google Patents

Shutter for molecular beam source

Info

Publication number
JPS62145809A
JPS62145809A JP28744385A JP28744385A JPS62145809A JP S62145809 A JPS62145809 A JP S62145809A JP 28744385 A JP28744385 A JP 28744385A JP 28744385 A JP28744385 A JP 28744385A JP S62145809 A JPS62145809 A JP S62145809A
Authority
JP
Japan
Prior art keywords
shaft
blade
actuator
shutter
coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28744385A
Other languages
Japanese (ja)
Inventor
Kazunori Ando
和徳 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP28744385A priority Critical patent/JPS62145809A/en
Publication of JPS62145809A publication Critical patent/JPS62145809A/en
Pending legal-status Critical Current

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  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE:To effectively transmit a rotary motion from an actuator to a blade by using a spring pin for coupling the shaft of the actuator with that of a rotary input terminal. CONSTITUTION:The shaft 9 of an actuator 4 is secured to a coupling 5 by a spring pin 8, and the shaft 10 of a rotary input terminal 3 is fixed to the coupling 5 by the pin 8. Thus, the shafts 9 and 10 can be effectively secured without looseness. Similarly, the shaft 11 of the terminal 3 is effectively secured to the shaft 1 of a blade by the coupling 5 and the pin 8. The shaft 1 is effectively secured to the blade 2 by welding. Thus, since screws which cause looseness are not used, the pin is used to couple the shafts 9, 10 and 11, 1 and the shaft 1 is coupled with the blade 2 by welding, a rotary motion from the actuator 4 to the blade 2 can be effectively transmitted without looseness.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、半導体製造装置に用いる分子線源用シャッ
タに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a shutter for a molecular beam source used in semiconductor manufacturing equipment.

〔発明の概要〕[Summary of the invention]

本発明は、アクチュエータ、回転導入端子、羽根からな
る分子線源用シャッタにおいて、アクチュエータの軸と
回転導入端子の軸との結合または回転導入端子の軸と羽
根の軸との結合にスプリングビン全開い、また、羽根の
軸と羽根との結合は溶接とすることにより、回転運動の
伝達にゆるみを生じないようにしたものである。The present invention provides a shutter for a molecular beam source consisting of an actuator, a rotation introduction terminal, and a blade, in which the spring bin is fully opened when the axis of the actuator and the axis of the rotation introduction terminal are connected, or the axis of the rotation introduction terminal and the axis of the blade are connected. Furthermore, the shaft of the blade and the blade are connected by welding to prevent loosening in the transmission of rotational motion.

〔従来の技術〕[Conventional technology]

従来、第２図に示すように、アクチュエータ夕４の軸９
と回転導入端子６の軸１０との結合、および回転導入端
子６の軸１１と羽根の軸１との結合において、カップリ
ング５とネジ６による同定が知られている。Conventionally, as shown in FIG.
Identification using a coupling 5 and a screw 6 is known for coupling the shaft 10 of the rotation introduction terminal 6 to the shaft 10 of the rotation introduction terminal 6, and for coupling the shaft 11 of the rotation introduction terminal 6 to the shaft 1 of the blade.

また、羽根の軸１と羽根２との結合において、ネジ７に
よる固定が知られている。Further, in connection of the blade shaft 1 and the blade 2, fixing with a screw 7 is known.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし、従来の分子線源用シャッタは、ひんばんに往復
回転運動を行うと、ネジ６およびネジ７がゆるんで、ア
クチュエータ４から羽根２への回転運動の伝達ができな
くなってしまう欠点があった。However, the conventional shutter for molecular beam sources has the disadvantage that when the shutter is frequently rotated back and forth, the screws 6 and 7 become loose, making it impossible to transmit the rotational motion from the actuator 4 to the blade 2. .

そこで、この発明は、従来のこのような欠点を解決する
ため、アクチュエータから羽根への回転運動の伝達が、
ゆるむことなく、確実に行われる分子線源用シャッタを
得ることを目的としている。Therefore, in order to solve these conventional drawbacks, this invention aims to improve the transmission of rotational motion from the actuator to the blades.
The purpose is to obtain a shutter for a molecular beam source that can be operated reliably without loosening.

〔問題点を解決するための手段〕[Means for solving problems]

上記問題点を解決するために、この発明においては、ア
クチュエータの軸と回転導入端子の軸との結合に、また
、回転導入端子の軸と羽根の軸との結合に°スプリング
ビンを用い、ま几、羽根の軸と羽根との結合は溶接とす
る構成とし、アクチュエータから羽根−＼の回転運動の
伝達が、ゆるむことなく、確実に行われるようにした。In order to solve the above problems, in this invention, spring bins are used to connect the shaft of the actuator and the shaft of the rotation introduction terminal, and also to the shaft of the rotation introduction terminal and the shaft of the blade. The shaft of the blade and the blade are welded together to ensure that the rotational motion of the blade is transmitted from the actuator to the blade without loosening.

〔作　用〕[For production]

上記のように構成された分子線源用シャッタのアクチュ
エータの軸が回転すると、カップリングとスプリングビ
ンを介して回転導入端子の軸が回転し、さらに、羽根の
軸に溶接された羽根が回転するため、アクチュエータか
ら羽根までゆるむことなく、回転運動全確実に伝達でき
るのである。When the shaft of the actuator of the molecular beam source shutter configured as above rotates, the shaft of the rotation introduction terminal rotates via the coupling and spring bin, and the blades welded to the blade shaft also rotate. Therefore, rotational motion can be completely transmitted from the actuator to the blade without loosening.

〔実施例〕〔Example〕

以下にこの発明の実施例を図面にもとづいて説明する。 Embodiments of the present invention will be described below based on the drawings.

第１図において、アクチュエータ４の軸９とカップリン
グ５はスプリングビン８によって固着する。さらに、回
転導入端子３の軸１０とカップリング５はスプリングビ
ン８によって固着する。こｎで、アクチュエータ・４，
１の軸９と回転導入端子５の軸１０とは、ゆるむことな
く確実に固着される。In FIG. 1, the shaft 9 of the actuator 4 and the coupling 5 are fixed by a spring pin 8. Further, the shaft 10 of the rotation introduction terminal 3 and the coupling 5 are fixed by a spring pin 8. Now actuator 4,
The shaft 9 of the rotation introduction terminal 5 and the shaft 10 of the rotation introduction terminal 5 are securely fixed without loosening.

同様にして、回転導入端子３の軸１１と羽根の軸１とを
、カップリングＯとスプリングビン８によって確実に固
着する。羽根の軸１と羽根２は、溶接によって確実に固
着される。Similarly, the shaft 11 of the rotation introduction terminal 3 and the shaft 1 of the blade are securely fixed by the coupling O and the spring pin 8. The blade shaft 1 and the blade 2 are securely fixed together by welding.

以上のように、ゆるみの原因となるネジを用いず、軸９
と軸１０との結合ならびに軸１１と軸１の結合にスプリ
ングビンを用い、軸１と羽根２との結合は溶接としたた
め、アクチュエータ４から羽根２への回転運動がゆるむ
ことなく確実に伝達される。As mentioned above, without using screws that may cause loosening, the shaft 9
Since a spring bin is used to connect the actuator 4 to the shaft 10 and the shaft 11 to the shaft 1, and welding is used to connect the shaft 1 and the blade 2, the rotational motion from the actuator 4 to the blade 2 is reliably transmitted without loosening. Ru.

〔発明の効果〕〔Effect of the invention〕

この発明は以上説明したように、軸と軸との結合にスプ
リングビンを用い、軸と羽根との結合は溶接としたこと
で、アクチュエータから羽根への回転運動の伝達を確実
に行える効果がある。As explained above, this invention has the effect of reliably transmitting rotational motion from the actuator to the blades by using a spring bin to connect the shafts and by welding the shafts to the blades. .

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、この発明にかかる分子線源用シャッタの断面
図、第２図は、従来の分子線源用ジャツブ魁− タの断面図である。 １・・・・・・羽根の軸 ２・・・・・・羽根 ３・・・・・・回転導入端子 ４・・・・・・アクチュエータ ８・・・・・・スプリングビン ９・・・・・・軸 １０・・・・・・軸 １１・・・・・・軸 以　　　上 出願人　セイコー電子工業株式会社 −６で、１FIG. 1 is a sectional view of a shutter for a molecular beam source according to the present invention, and FIG. 2 is a sectional view of a conventional shutter for a molecular beam source. 1...Blade shaft 2...Blade 3...Rotation introduction terminal 4...Actuator 8...Spring bin 9... ...Axis 10...Axis 11...Axis or above Applicant Seiko Electronics Co., Ltd.-6, 1

Claims (3)

【特許請求の範囲】[Claims] （１）少なくともアクチュエータと回転導入端子と羽根
を有する分子線源用シャッタにおいて、前記アクチュエ
ータの軸と回転導入端子の軸との結合をスプリングピン
を用いて行なったことを特徴とする分子線源用シャッタ
。(1) A shutter for a molecular beam source having at least an actuator, a rotation introduction terminal, and a blade, wherein the axis of the actuator and the axis of the rotation introduction terminal are connected using a spring pin. Shutter. （２）少なくともアクチュエータと回転導入端子と羽根
を有する分子線源用シャッタにおいて、回転導入端子の
軸と羽根の軸との結合をスプリングピンを用いて行なっ
たことを特徴とする分子線源用シャッタ。(2) A shutter for a molecular beam source having at least an actuator, a rotation introduction terminal, and a blade, characterized in that the axis of the rotation introduction terminal and the axis of the blade are connected using a spring pin. . （３）少なくともアクチュエータと回転導入端子と羽根
を有する分子線源用シャッタにおいて、羽根の軸と羽根
との結合を溶接を用いて行なったことを特徴とする分子
線源用シャッタ。(3) A molecular beam source shutter having at least an actuator, a rotation introduction terminal, and a blade, characterized in that the shaft of the blade and the blade are joined by welding.
JP28744385A 1985-12-20 1985-12-20 Shutter for molecular beam source Pending JPS62145809A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28744385A JPS62145809A (en) 1985-12-20 1985-12-20 Shutter for molecular beam source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28744385A JPS62145809A (en) 1985-12-20 1985-12-20 Shutter for molecular beam source

Publications (1)

Publication Number Publication Date
JPS62145809A true JPS62145809A (en) 1987-06-29

Family

ID=17717387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28744385A Pending JPS62145809A (en) 1985-12-20 1985-12-20 Shutter for molecular beam source

Country Status (1)

Country Link
JP (1) JPS62145809A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0529687A2 (en) * 1988-03-30 1993-03-03 Rohm Co., Ltd. Molecular beam epitaxy apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0529687A2 (en) * 1988-03-30 1993-03-03 Rohm Co., Ltd. Molecular beam epitaxy apparatus

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