JPS6214553U - - Google Patents

Info

Publication number

JPS6214553U

JPS6214553U JP10565785U JP10565785U JPS6214553U JP S6214553 U JPS6214553 U JP S6214553U JP 10565785 U JP10565785 U JP 10565785U JP 10565785 U JP10565785 U JP 10565785U JP S6214553 U JPS6214553 U JP S6214553U

Authority

JP

Japan

Prior art keywords

pedometer

flexible portion

cantilever

silicon substrate

detection element

Prior art date

1985-07-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
• 229910052710 silicon Inorganic materials 0.000 claims description 3
• 239000010703 silicon Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• 238000001514 detection method Methods 0.000 claims description 2
• 238000005530 etching Methods 0.000 claims 1