JPS62145334U - - Google Patents

Info

Publication number
JPS62145334U
JPS62145334U JP3447286U JP3447286U JPS62145334U JP S62145334 U JPS62145334 U JP S62145334U JP 3447286 U JP3447286 U JP 3447286U JP 3447286 U JP3447286 U JP 3447286U JP S62145334 U JPS62145334 U JP S62145334U
Authority
JP
Japan
Prior art keywords
susceptor
workpiece
processing apparatus
sent
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3447286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3447286U priority Critical patent/JPS62145334U/ja
Publication of JPS62145334U publication Critical patent/JPS62145334U/ja
Pending legal-status Critical Current

Links

JP3447286U 1986-03-08 1986-03-08 Pending JPS62145334U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3447286U JPS62145334U (US07655688-20100202-C00086.png) 1986-03-08 1986-03-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3447286U JPS62145334U (US07655688-20100202-C00086.png) 1986-03-08 1986-03-08

Publications (1)

Publication Number Publication Date
JPS62145334U true JPS62145334U (US07655688-20100202-C00086.png) 1987-09-12

Family

ID=30843058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3447286U Pending JPS62145334U (US07655688-20100202-C00086.png) 1986-03-08 1986-03-08

Country Status (1)

Country Link
JP (1) JPS62145334U (US07655688-20100202-C00086.png)

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