JPS62145324U - - Google Patents
Info
- Publication number
- JPS62145324U JPS62145324U JP3122486U JP3122486U JPS62145324U JP S62145324 U JPS62145324 U JP S62145324U JP 3122486 U JP3122486 U JP 3122486U JP 3122486 U JP3122486 U JP 3122486U JP S62145324 U JPS62145324 U JP S62145324U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- forming apparatus
- thin film
- discharge port
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3122486U JPS62145324U (no) | 1986-03-06 | 1986-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3122486U JPS62145324U (no) | 1986-03-06 | 1986-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62145324U true JPS62145324U (no) | 1987-09-12 |
Family
ID=30836760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3122486U Pending JPS62145324U (no) | 1986-03-06 | 1986-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62145324U (no) |
-
1986
- 1986-03-06 JP JP3122486U patent/JPS62145324U/ja active Pending
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