JPS62145299U - - Google Patents

Info

Publication number
JPS62145299U
JPS62145299U JP3403586U JP3403586U JPS62145299U JP S62145299 U JPS62145299 U JP S62145299U JP 3403586 U JP3403586 U JP 3403586U JP 3403586 U JP3403586 U JP 3403586U JP S62145299 U JPS62145299 U JP S62145299U
Authority
JP
Japan
Prior art keywords
processing solution
microwave
discharge port
supply port
solution supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3403586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3403586U priority Critical patent/JPS62145299U/ja
Publication of JPS62145299U publication Critical patent/JPS62145299U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Constitution Of High-Frequency Heating (AREA)
JP3403586U 1986-03-10 1986-03-10 Pending JPS62145299U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3403586U JPS62145299U (enrdf_load_stackoverflow) 1986-03-10 1986-03-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3403586U JPS62145299U (enrdf_load_stackoverflow) 1986-03-10 1986-03-10

Publications (1)

Publication Number Publication Date
JPS62145299U true JPS62145299U (enrdf_load_stackoverflow) 1987-09-12

Family

ID=30842202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3403586U Pending JPS62145299U (enrdf_load_stackoverflow) 1986-03-10 1986-03-10

Country Status (1)

Country Link
JP (1) JPS62145299U (enrdf_load_stackoverflow)

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