JPS62145263U - - Google Patents

Info

Publication number
JPS62145263U
JPS62145263U JP3372286U JP3372286U JPS62145263U JP S62145263 U JPS62145263 U JP S62145263U JP 3372286 U JP3372286 U JP 3372286U JP 3372286 U JP3372286 U JP 3372286U JP S62145263 U JPS62145263 U JP S62145263U
Authority
JP
Japan
Prior art keywords
wafer
holder
rotating shaft
attached
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3372286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3372286U priority Critical patent/JPS62145263U/ja
Publication of JPS62145263U publication Critical patent/JPS62145263U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP3372286U 1986-03-08 1986-03-08 Pending JPS62145263U (US06589383-20030708-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3372286U JPS62145263U (US06589383-20030708-C00041.png) 1986-03-08 1986-03-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3372286U JPS62145263U (US06589383-20030708-C00041.png) 1986-03-08 1986-03-08

Publications (1)

Publication Number Publication Date
JPS62145263U true JPS62145263U (US06589383-20030708-C00041.png) 1987-09-12

Family

ID=30841595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3372286U Pending JPS62145263U (US06589383-20030708-C00041.png) 1986-03-08 1986-03-08

Country Status (1)

Country Link
JP (1) JPS62145263U (US06589383-20030708-C00041.png)

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