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Priority to JP3164686UpriorityCriticalpatent/JPS62144983U/ja
Publication of JPS62144983UpublicationCriticalpatent/JPS62144983U/ja
"metodo para la deposicion de un cuerpo de material de silicio amorfo en capas multiples sobre un sustrato" divisional de la patente de invencion n 516.034n0 solicitada en:28 de septiembre de 1982