JPS62144136U - - Google Patents

Info

Publication number
JPS62144136U
JPS62144136U JP3182686U JP3182686U JPS62144136U JP S62144136 U JPS62144136 U JP S62144136U JP 3182686 U JP3182686 U JP 3182686U JP 3182686 U JP3182686 U JP 3182686U JP S62144136 U JPS62144136 U JP S62144136U
Authority
JP
Japan
Prior art keywords
guide surface
motion guide
feed mechanism
stage
linear motion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3182686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3182686U priority Critical patent/JPS62144136U/ja
Publication of JPS62144136U publication Critical patent/JPS62144136U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Electron Beam Exposure (AREA)
JP3182686U 1986-03-07 1986-03-07 Pending JPS62144136U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3182686U JPS62144136U (US07709020-20100504-C00041.png) 1986-03-07 1986-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3182686U JPS62144136U (US07709020-20100504-C00041.png) 1986-03-07 1986-03-07

Publications (1)

Publication Number Publication Date
JPS62144136U true JPS62144136U (US07709020-20100504-C00041.png) 1987-09-11

Family

ID=30837918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3182686U Pending JPS62144136U (US07709020-20100504-C00041.png) 1986-03-07 1986-03-07

Country Status (1)

Country Link
JP (1) JPS62144136U (US07709020-20100504-C00041.png)

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