JPS62144057U - - Google Patents

Info

Publication number
JPS62144057U
JPS62144057U JP3063986U JP3063986U JPS62144057U JP S62144057 U JPS62144057 U JP S62144057U JP 3063986 U JP3063986 U JP 3063986U JP 3063986 U JP3063986 U JP 3063986U JP S62144057 U JPS62144057 U JP S62144057U
Authority
JP
Japan
Prior art keywords
filament
shaft
ion source
attached
clamp member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3063986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3063986U priority Critical patent/JPS62144057U/ja
Publication of JPS62144057U publication Critical patent/JPS62144057U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP3063986U 1986-03-05 1986-03-05 Pending JPS62144057U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3063986U JPS62144057U (OSRAM) 1986-03-05 1986-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3063986U JPS62144057U (OSRAM) 1986-03-05 1986-03-05

Publications (1)

Publication Number Publication Date
JPS62144057U true JPS62144057U (OSRAM) 1987-09-11

Family

ID=30835635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3063986U Pending JPS62144057U (OSRAM) 1986-03-05 1986-03-05

Country Status (1)

Country Link
JP (1) JPS62144057U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018529187A (ja) * 2015-08-26 2018-10-04 アクセリス テクノロジーズ, インコーポレイテッド カム作動のフィラメントクランプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018529187A (ja) * 2015-08-26 2018-10-04 アクセリス テクノロジーズ, インコーポレイテッド カム作動のフィラメントクランプ

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