JPS62142840U - - Google Patents
Info
- Publication number
- JPS62142840U JPS62142840U JP2972886U JP2972886U JPS62142840U JP S62142840 U JPS62142840 U JP S62142840U JP 2972886 U JP2972886 U JP 2972886U JP 2972886 U JP2972886 U JP 2972886U JP S62142840 U JPS62142840 U JP S62142840U
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- shutter member
- diffusion
- tapered surface
- shutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 12
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2972886U JPS62142840U (ja�@�@) | 1986-02-28 | 1986-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2972886U JPS62142840U (ja�@�@) | 1986-02-28 | 1986-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62142840U true JPS62142840U (ja�@�@) | 1987-09-09 |
Family
ID=30833876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2972886U Pending JPS62142840U (ja�@�@) | 1986-02-28 | 1986-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62142840U (ja�@�@) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57107029A (en) * | 1980-12-25 | 1982-07-03 | Seiko Epson Corp | Semiconductor manufacturing device |
| JPS59194429A (ja) * | 1983-04-18 | 1984-11-05 | Rohm Co Ltd | 拡散炉 |
-
1986
- 1986-02-28 JP JP2972886U patent/JPS62142840U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57107029A (en) * | 1980-12-25 | 1982-07-03 | Seiko Epson Corp | Semiconductor manufacturing device |
| JPS59194429A (ja) * | 1983-04-18 | 1984-11-05 | Rohm Co Ltd | 拡散炉 |
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