JPS62142840U - - Google Patents

Info

Publication number
JPS62142840U
JPS62142840U JP2972886U JP2972886U JPS62142840U JP S62142840 U JPS62142840 U JP S62142840U JP 2972886 U JP2972886 U JP 2972886U JP 2972886 U JP2972886 U JP 2972886U JP S62142840 U JPS62142840 U JP S62142840U
Authority
JP
Japan
Prior art keywords
quartz tube
shutter member
diffusion
tapered surface
shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2972886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2972886U priority Critical patent/JPS62142840U/ja
Publication of JPS62142840U publication Critical patent/JPS62142840U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP2972886U 1986-02-28 1986-02-28 Pending JPS62142840U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2972886U JPS62142840U (enrdf_load_stackoverflow) 1986-02-28 1986-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2972886U JPS62142840U (enrdf_load_stackoverflow) 1986-02-28 1986-02-28

Publications (1)

Publication Number Publication Date
JPS62142840U true JPS62142840U (enrdf_load_stackoverflow) 1987-09-09

Family

ID=30833876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2972886U Pending JPS62142840U (enrdf_load_stackoverflow) 1986-02-28 1986-02-28

Country Status (1)

Country Link
JP (1) JPS62142840U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57107029A (en) * 1980-12-25 1982-07-03 Seiko Epson Corp Semiconductor manufacturing device
JPS59194429A (ja) * 1983-04-18 1984-11-05 Rohm Co Ltd 拡散炉

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57107029A (en) * 1980-12-25 1982-07-03 Seiko Epson Corp Semiconductor manufacturing device
JPS59194429A (ja) * 1983-04-18 1984-11-05 Rohm Co Ltd 拡散炉

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