JPS62142020U - - Google Patents
Info
- Publication number
- JPS62142020U JPS62142020U JP2875086U JP2875086U JPS62142020U JP S62142020 U JPS62142020 U JP S62142020U JP 2875086 U JP2875086 U JP 2875086U JP 2875086 U JP2875086 U JP 2875086U JP S62142020 U JPS62142020 U JP S62142020U
- Authority
- JP
- Japan
- Prior art keywords
- reflecting mirror
- photoelectric element
- reflected
- spring
- movable part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 2
- 230000000694 effects Effects 0.000 claims 1
- 230000005284 excitation Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Mechanical Optical Scanning Systems (AREA)
Description
第１図は本考案の一実施例を示す構成説明図、
第２図は他の実施例を示す構成説明図、第３図は
本考案に用いる偏向板の構成斜視図イと下部ばね
の―断面図ロ、第４図は第１図に示す光偏向
板の反射光路に光電素子を配置した状態を示す構
成図、第５図は反射光の振幅と光電素子の出力を
示す説明図である。
１……光偏向板、２……上部ばね、３……下部
ばね、４ａ，４ｂ……電極、１０……可動部（反
射鏡）、２０……光電素子、２１，２５……増幅
器、２２……可変増幅器、２３……基準信号源、
２４……ＡＧＣ回路。
FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention;
Fig. 2 is a structural explanatory diagram showing another embodiment, Fig. 3 is a perspective view of the structure of the deflection plate used in the present invention and a cross-sectional view of the lower spring, and Fig. 4 is the light deflection plate shown in Fig. 1. FIG. 5 is an explanatory diagram showing the amplitude of reflected light and the output of the photoelectric element. DESCRIPTION OF SYMBOLS 1... Light deflection plate, 2... Upper spring, 3... Lower spring, 4a, 4b... Electrode, 10... Movable part (reflector), 20... Photoelectric element, 21, 25... Amplifier, 22 ... variable amplifier, 23 ... reference signal source,
24...AGC circuit.
Claims (1)
される可動部を形成し、前記可動部に反射鏡を設
けるとともに前記ばね部に励振用電極を設け、自
励振回路と組み合わせて前記可動板を自励振させ
るように構成し、前記ばね部と反射鏡により決ま
る固有振動数により、前記反射鏡をねじり振動さ
せ、前記反射鏡で反射した反射ビームを所定の振
幅で偏向させる光偏向器において、前記反射ビー
ムの光路の途中に光電素子を配置し、前記光電素
子を通過する光ビームの時間間隔の比を測定する
ことにより、振動振幅を一定に制御するように構
成したことを特徴とする光偏向器。 A movable part supported by a spring part is formed on a substrate having a piezoelectric effect, a reflecting mirror is provided on the movable part, an excitation electrode is provided on the spring part, and the movable plate is combined with a self-excitation circuit. In the optical deflector configured to cause self-oscillation, the reflecting mirror is torsionally vibrated by a natural frequency determined by the spring portion and the reflecting mirror, and the reflected beam reflected by the reflecting mirror is deflected with a predetermined amplitude. A light deflection device characterized in that a photoelectric element is arranged in the middle of the optical path of a reflected beam, and the vibration amplitude is controlled to be constant by measuring the ratio of time intervals of the light beam passing through the photoelectric element. vessel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2875086U JPS62142020U (en) | 1986-02-28 | 1986-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2875086U JPS62142020U (en) | 1986-02-28 | 1986-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62142020U true JPS62142020U (en) | 1987-09-08 |
Family
ID=30832003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2875086U Pending JPS62142020U (en) | 1986-02-28 | 1986-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62142020U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5460944A (en) * | 1977-10-24 | 1979-05-16 | Canon Inc | Galvanomirror scanner |
-
1986
- 1986-02-28 JP JP2875086U patent/JPS62142020U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5460944A (en) * | 1977-10-24 | 1979-05-16 | Canon Inc | Galvanomirror scanner |
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