JPS62141136U - - Google Patents
Info
- Publication number
- JPS62141136U JPS62141136U JP2814686U JP2814686U JPS62141136U JP S62141136 U JPS62141136 U JP S62141136U JP 2814686 U JP2814686 U JP 2814686U JP 2814686 U JP2814686 U JP 2814686U JP S62141136 U JPS62141136 U JP S62141136U
- Authority
- JP
- Japan
- Prior art keywords
- floor
- entrance
- ultra
- under
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000746 purification Methods 0.000 claims description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2814686U JPS62141136U (fr) | 1986-02-27 | 1986-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2814686U JPS62141136U (fr) | 1986-02-27 | 1986-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62141136U true JPS62141136U (fr) | 1987-09-05 |
Family
ID=30830836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2814686U Pending JPS62141136U (fr) | 1986-02-27 | 1986-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62141136U (fr) |
-
1986
- 1986-02-27 JP JP2814686U patent/JPS62141136U/ja active Pending