JPS62140726U - - Google Patents
Info
- Publication number
- JPS62140726U JPS62140726U JP2660686U JP2660686U JPS62140726U JP S62140726 U JPS62140726 U JP S62140726U JP 2660686 U JP2660686 U JP 2660686U JP 2660686 U JP2660686 U JP 2660686U JP S62140726 U JPS62140726 U JP S62140726U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holding
- coating device
- orientation flat
- rotary coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2660686U JPS62140726U (no) | 1986-02-27 | 1986-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2660686U JPS62140726U (no) | 1986-02-27 | 1986-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62140726U true JPS62140726U (no) | 1987-09-05 |
Family
ID=30827845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2660686U Pending JPS62140726U (no) | 1986-02-27 | 1986-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62140726U (no) |
-
1986
- 1986-02-27 JP JP2660686U patent/JPS62140726U/ja active Pending