JPS62140351U - - Google Patents

Info

Publication number
JPS62140351U
JPS62140351U JP2513286U JP2513286U JPS62140351U JP S62140351 U JPS62140351 U JP S62140351U JP 2513286 U JP2513286 U JP 2513286U JP 2513286 U JP2513286 U JP 2513286U JP S62140351 U JPS62140351 U JP S62140351U
Authority
JP
Japan
Prior art keywords
foreign object
object detection
detector
detection device
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2513286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH048351Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2513286U priority Critical patent/JPH048351Y2/ja
Publication of JPS62140351U publication Critical patent/JPS62140351U/ja
Application granted granted Critical
Publication of JPH048351Y2 publication Critical patent/JPH048351Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
JP2513286U 1986-02-25 1986-02-25 Expired JPH048351Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2513286U JPH048351Y2 (https=) 1986-02-25 1986-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2513286U JPH048351Y2 (https=) 1986-02-25 1986-02-25

Publications (2)

Publication Number Publication Date
JPS62140351U true JPS62140351U (https=) 1987-09-04
JPH048351Y2 JPH048351Y2 (https=) 1992-03-03

Family

ID=30824999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2513286U Expired JPH048351Y2 (https=) 1986-02-25 1986-02-25

Country Status (1)

Country Link
JP (1) JPH048351Y2 (https=)

Also Published As

Publication number Publication date
JPH048351Y2 (https=) 1992-03-03

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