JPS6213877U - - Google Patents
Info
- Publication number
- JPS6213877U JPS6213877U JP10638185U JP10638185U JPS6213877U JP S6213877 U JPS6213877 U JP S6213877U JP 10638185 U JP10638185 U JP 10638185U JP 10638185 U JP10638185 U JP 10638185U JP S6213877 U JPS6213877 U JP S6213877U
- Authority
- JP
- Japan
- Prior art keywords
- different shapes
- partitions
- wafer storage
- partition
- shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 6
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は本考案のウエハー収納容器の仕切り部
形状を示す断面図である。 １…仕切り部形状ａ、２…仕切り部形状ｂ。
形状を示す断面図である。 １…仕切り部形状ａ、２…仕切り部形状ｂ。
Claims (1)
- ウエハー収納部の仕切り部形状を少なくとも２
種類の異なる形状とし、異なる形状を有する仕切
り部を周期的に配列したことを特徴とするウエハ
ー収納容器。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10638185U JPS6213877U (ja) | 1985-07-11 | 1985-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10638185U JPS6213877U (ja) | 1985-07-11 | 1985-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6213877U true JPS6213877U (ja) | 1987-01-27 |
Family
ID=30981683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10638185U Pending JPS6213877U (ja) | 1985-07-11 | 1985-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6213877U (ja) |
-
1985
- 1985-07-11 JP JP10638185U patent/JPS6213877U/ja active Pending