JPS62138446U - - Google Patents

Info

Publication number
JPS62138446U
JPS62138446U JP2692986U JP2692986U JPS62138446U JP S62138446 U JPS62138446 U JP S62138446U JP 2692986 U JP2692986 U JP 2692986U JP 2692986 U JP2692986 U JP 2692986U JP S62138446 U JPS62138446 U JP S62138446U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
light
receiving sensor
detection device
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2692986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2692986U priority Critical patent/JPS62138446U/ja
Publication of JPS62138446U publication Critical patent/JPS62138446U/ja
Pending legal-status Critical Current

Links

JP2692986U 1986-02-25 1986-02-25 Pending JPS62138446U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2692986U JPS62138446U (US07534539-20090519-C00280.png) 1986-02-25 1986-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2692986U JPS62138446U (US07534539-20090519-C00280.png) 1986-02-25 1986-02-25

Publications (1)

Publication Number Publication Date
JPS62138446U true JPS62138446U (US07534539-20090519-C00280.png) 1987-09-01

Family

ID=30828484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2692986U Pending JPS62138446U (US07534539-20090519-C00280.png) 1986-02-25 1986-02-25

Country Status (1)

Country Link
JP (1) JPS62138446U (US07534539-20090519-C00280.png)

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