JPS62138444U - - Google Patents

Info

Publication number
JPS62138444U
JPS62138444U JP2560286U JP2560286U JPS62138444U JP S62138444 U JPS62138444 U JP S62138444U JP 2560286 U JP2560286 U JP 2560286U JP 2560286 U JP2560286 U JP 2560286U JP S62138444 U JPS62138444 U JP S62138444U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
center
base plate
transfer device
gravity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2560286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2560286U priority Critical patent/JPS62138444U/ja
Publication of JPS62138444U publication Critical patent/JPS62138444U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
JP2560286U 1986-02-24 1986-02-24 Pending JPS62138444U (US20050075337A1-20050407-C00081.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2560286U JPS62138444U (US20050075337A1-20050407-C00081.png) 1986-02-24 1986-02-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2560286U JPS62138444U (US20050075337A1-20050407-C00081.png) 1986-02-24 1986-02-24

Publications (1)

Publication Number Publication Date
JPS62138444U true JPS62138444U (US20050075337A1-20050407-C00081.png) 1987-09-01

Family

ID=30825907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2560286U Pending JPS62138444U (US20050075337A1-20050407-C00081.png) 1986-02-24 1986-02-24

Country Status (1)

Country Link
JP (1) JPS62138444U (US20050075337A1-20050407-C00081.png)

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