JPS62137549U - - Google Patents

Info

Publication number
JPS62137549U
JPS62137549U JP2555186U JP2555186U JPS62137549U JP S62137549 U JPS62137549 U JP S62137549U JP 2555186 U JP2555186 U JP 2555186U JP 2555186 U JP2555186 U JP 2555186U JP S62137549 U JPS62137549 U JP S62137549U
Authority
JP
Japan
Prior art keywords
nozzle
arc chamber
recess
ion source
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2555186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2555186U priority Critical patent/JPS62137549U/ja
Publication of JPS62137549U publication Critical patent/JPS62137549U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP2555186U 1986-02-24 1986-02-24 Pending JPS62137549U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2555186U JPS62137549U (US06826419-20041130-M00005.png) 1986-02-24 1986-02-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2555186U JPS62137549U (US06826419-20041130-M00005.png) 1986-02-24 1986-02-24

Publications (1)

Publication Number Publication Date
JPS62137549U true JPS62137549U (US06826419-20041130-M00005.png) 1987-08-29

Family

ID=30825809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2555186U Pending JPS62137549U (US06826419-20041130-M00005.png) 1986-02-24 1986-02-24

Country Status (1)

Country Link
JP (1) JPS62137549U (US06826419-20041130-M00005.png)

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