JPS62137438U - - Google Patents
Info
- Publication number
- JPS62137438U JPS62137438U JP1986024754U JP2475486U JPS62137438U JP S62137438 U JPS62137438 U JP S62137438U JP 1986024754 U JP1986024754 U JP 1986024754U JP 2475486 U JP2475486 U JP 2475486U JP S62137438 U JPS62137438 U JP S62137438U
- Authority
- JP
- Japan
- Prior art keywords
- light
- main surface
- transmitting substrate
- pattern
- photomask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986024754U JPS62137438U (hu) | 1986-02-21 | 1986-02-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986024754U JPS62137438U (hu) | 1986-02-21 | 1986-02-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62137438U true JPS62137438U (hu) | 1987-08-29 |
Family
ID=30824273
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986024754U Pending JPS62137438U (hu) | 1986-02-21 | 1986-02-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62137438U (hu) |
-
1986
- 1986-02-21 JP JP1986024754U patent/JPS62137438U/ja active Pending