JPS62136989U - - Google Patents

Info

Publication number

JPS62136989U

JPS62136989U JP2350886U JP2350886U JPS62136989U JP S62136989 U JPS62136989 U JP S62136989U JP 2350886 U JP2350886 U JP 2350886U JP 2350886 U JP2350886 U JP 2350886U JP S62136989 U JPS62136989 U JP S62136989U

Authority

JP

Japan

Prior art keywords

contamination

pump

degree

liquid supply

detection device

Prior art date

1986-02-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 5
• 239000007788 liquid Substances 0.000 claims description 4
• 238000005406 washing Methods 0.000 claims description 4
• 238000011109 contamination Methods 0.000 claims 6
• 239000002904 solvent Substances 0.000 claims 2
• 238000000034 method Methods 0.000 claims 1
• 230000001105 regulatory effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2